Course Title: MicroNanoSystems, MEMS, and NEMS

Part A: Course Overview

Course Title: MicroNanoSystems, MEMS, and NEMS

Credit Points: 12.00

Terms

Course Code

Campus

Career

School

Learning Mode

Teaching Period(s)

EEET2044

City Campus

Postgraduate

125H Electrical & Computer Engineering

Face-to-Face

Sem 1 2006,
Sem 2 2006,
Sem 2 2007,
Sem 1 2010,
Sem 1 2011,
Sem 1 2012,
Sem 1 2013,
Sem 1 2014,
Sem 2 2015,
Sem 2 2016

EEET2044

City Campus

Postgraduate

172H School of Engineering

Face-to-Face

Sem 1 2018,
Sem 1 2019,
Sem 1 2020,
Sem 2 2021,
Sem 2 2022,
Sem 2 2023

EEET2379

City Campus

Undergraduate

125H Electrical & Computer Engineering

Face-to-Face

Sem 1 2012,
Sem 1 2013,
Sem 1 2014,
Sem 2 2015,
Sem 2 2016

EEET2379

City Campus

Undergraduate

172H School of Engineering

Face-to-Face

Sem 1 2018,
Sem 1 2019,
Sem 2 2021,
Sem 2 2022,
Sem 2 2023

Course Coordinator: Associate Professor Khashayar Khoshmanesh

Course Coordinator Phone: +61 3 9925 2851

Course Coordinator Email: khashayar.khoshmanesh@rmit.edu.au

Course Coordinator Location: B012 F08 R009

Course Coordinator Availability: E-Mail for appointment


Pre-requisite Courses and Assumed Knowledge and Capabilities

Assumed Knowledge:
You are expected to have reasonable competency in electronics and mathematics.
It is recommended that you undertake courses related to microelectronics/microsystems fabrication prior to or in addition to this course, to achieve improved learning outcomes.


Course Description

Microsystems technology can broadly be defined as the development and integration of sensors, actuators, and other three-dimensional structures on the micron-scale and often using microelectronics fabrication techniques.

Microsystems technology encompasses the popular fields of micro-electro-mechanical systems (MEMS) and microfluidics. Both technologies are fast becoming ubiquitous, ranging in applications from automobiles (accelerometers) and computing (inkjet printer heads) to biomedical engineering (drug delivery systems, medical diagnostics). Through design and fabrication, microsystems technology combines different disciplines of engineering, physics, chemistry, and biomedicine to realise novel miniature devices.

This course is designed to introduce you to microsystems technology. It aims to provide you with the necessary knowledge and skills to design, model, micro-fabricate, and interface microsystem devices. The complementary unification of these areas gives you an integrated systems approach necessary for practical microsystems design. Throughout the course, an emphasis is placed on real-world applications of the technology, industry expectation, and research opportunities.

Please note that if you take this course for a bachelor honours program, your overall mark for the course will be one of the course marks used to calculate the weighted average mark (WAM) that will determine your award level. This applies to students who commence enrolment in a bachelor honours program from 1 January 2016 onwards. See the WAM information webpage for more information (www1.rmit.edu.au/browse;ID=eyj5c0mo77631).


Objectives/Learning Outcomes/Capability Development

This course develops the following Program Learning Outcomes:

  • High levels of technical competence in the field
  • Be able to apply problem solving approaches to work challenges and make decisions using sound engineering methodologies
  • Be able to apply a systematic design approach to engineering projects and have strong research and design skills in their stream
  • Effective teamwork and leadership skills


On successful completion of this course, you will be able to:

  1. Design and analyse miniaturised devices and structures,
  2. Describe fabrication process and sequences,
  3. Develop and analyse a miniaturised actuator.


Overview of Learning Activities

The course will provide interactive and hands-on learning experiences. You will be actively engaged in a range of learning activities such as:

  • Lectures (Pre-recorded and face-to-face lectorials along with interactive tutorial components) covering the fundamentals of microsystems
  • Computer-based laboratory sessions (instructor guided) on microsystems design and processing tools
  • Group project to provide training in the development of miniaturised sensors/actuators

Delivery may be face to face, online or a mix of both. 

You are encouraged to be proactive and self-directed in your learning, asking questions of your lecturer and/or peers and seeking out information as required, especially from the numerous sources available through the RMIT library, and through links and material specific to this course that is available through myRMIT Studies Course.


Overview of Learning Resources

RMIT will provide you with resources and tools for learning in this course through myRMIT Studies Course. 

There are services available to support your learning through the University Library. The Library provides guides on academic referencing and subject specialist help as well as a range of study support services. For further information, please visit the Library page on the RMIT University website and the myRMIT student portal.


Overview of Assessment

Assessment Task 1: Design Assignment
Weighting 45%
This assessment task supports CLOs 1 and 2.

Assessment Task 2: Research Project Executive Summary (Group)
Weighting 20%
This assessment task supports CLOs 1, 2, and 3.

Assessment Task 3: Critical Literature Review (Group)
Students who cannot form a group can perform this project individually.
Weighting 35%
This assessment task supports CLOs 1, 2, and 3.

If you have a long term medical condition and/or disability it may be possible to negotiate to vary aspects of the learning or assessment methods. You can contact the program coordinator or Equitable Learning Services if you would like to find out more.