Our novel fabrication laboratory supports a number of competitive alternatives to standard lithography techniques for fabricating complex structures on the micro to nano scale and beyond.
This ISO 5 Class 100 laboratory provides researchers with tools for fabricating structures where conventional techniques such as ultraviolet or nanoimprint lithography have limitations.
The laboratory supports the use of large biomolecules or even cells in tissue engineering, which are vitally important materials for the leading fields of the future: organ engineering, protein engineering, and nanobioengineering.
- 3D laser lithography system (3DN)
3D laser lithography system (3DN)
Nanoscribe is a 3D laser lithography system. True 3D micro and nano structures with feature sizes down to 100 nm can be fabricated in various commercially available photoresists, positive and negative tone.
The laboratory also contains a broad range of tools to assist researchers in using the equipment. Full details are provided in the training modules and manuals for the laboratory.