Microsystems technology can broadly be defined as the development and integration of sensors, actuators, and other three-dimensional structures on the micron-scale and often using microelectronics fabrication techniques.

Microsystems technology encompasses the popular fields of micro-electro-mechanical systems (MEMS) and microfluidics. Both technologies are fast becoming ubiquitous, ranging in applications from automobiles (accelerometers) and computing (inkjet printer heads) to biomedical engineering (drug delivery systems, medical diagnostics). Through design and fabrication, microsystems technology combines different disciplines of engineering, physics, chemistry, and biomedicine to realise novel miniature devices.

This course is designed to introduce you to microsystems technology. It aims to provide you with the necessary knowledge and skills to design, model, micro-fabricate, and interface microsystem devices. The complementary unification of these areas gives you an integrated systems approach necessary for practical microsystems design. Throughout the course, an emphasis is placed on real-world applications of the technology, industry expectation, and research opportunities.