Course Summary
The course will focus on the fabrication procedures which are used in industry to produce semiconductor devices. The topic material will be supported where practicable by laboratory/clean room demonstrations and student activities relevant to the various processes presented in lectures.
The subject material is divided into five modules as follows:
- Introduction of basic fabrication processes, materials and clean room protocols.
- Photolithography, masking and patterning of materials.
- Semiconductor oxidation and diffusion.
- Ion implantation and thermal processing.
- Metal and dielectric deposition for contacts, gate and interconnect engineering.