The course will focus on the design and fabrication procedures which are used in industry to produce microchips such as semiconductor microelectronic circuits or integrated photonic devices. The topic material will be supported where practicable by laboratory/clean room demonstrations and student activities relevant to the various processes presented in lectures.

The subject material is divided into five modules as follows:

• Introduction of basic fabrication processes, materials and clean room protocols.
• Circuits and components design and simulation;
• Design rules checking;
• Photolithography, masking and patterning of materials.
• Semiconductor oxidation and diffusion.
• Ion implantation and thermal processing.
• Metal and dielectric deposition for contacts, gate and interconnect engineering.

This course includes a work integrated learning experience in which your knowledge and skills will be applied and assessed in a real or simulated workplace context and where feedback from industry and/ or community is integral to your experience.

If you are enrolled in this course as a component of your Bachelor Honours Program, your overall mark will contribute to the calculation of the Weighted Average Mark (WAM).