Equipment specification

Details of the instruments available in our Research facility. Including Electron Microscopes and Transmission Electron Microscopes.

  • Philips XL30 SEM (1999) with:
    • Oxford X-Max20 EDX Detector (2014)
    • Secondary Electron (SE) Imaging
    • Backscaterred Electron (BSE) Imaging
  • FEI Quanta 200 SEM (2002) with :
    • Oxford X-Max20 EDX Detector (2014)
    • Gatan Alto Cryo-stage
    • Low Vacuum and Environmental Imaging Modes
    • Secondary Electron (SE) Imaging
    • Backscaterred Electron (BSE) Imaging
  • FEI Nova NanoSEM 200 FEGSEM (2007) with:
    • Oxford X-Max20 EDX Detector (2014)
    • Oxford NordlysMax2 EBSD Detector
    • Nabity Electron Beam Lithography (EBL)
    • Scanning Transmission Electron Microscopy (STEM) Detector
    • Low Vacuum Imaging Mode
    • Through Lens Detector (TLD)
    • Secondary Electron (SE) Imaging
    • Backscaterred Electron (BSE) Imaging
  • FEI Scios Dualbeam FIBSEM with:
    • Oxford X-Max80 EDX Detector
    • Trinity Detection System (in-lens and in-column)
      • T1 segmented lower in-lens detector
      • T2 upper in-lens detector
      • T3 retractable in-column detector
    • Everhart-Thornley SE detector (ETD)
    • ICE detector (secondary electrons and ions)
    • DBS retractable segmented under lens BSED
    • STEM retractable segmented detector (BF, DF, HADF, HAADF)
  • FEI Verios 460L FEGSEM
    • Oxford X-Max20 EDX Detector
    • Elstar in-lens SE detector (TLD-SE)
    • Elstar in-lens BSE detector (TLD-BSE)
    • Elstar in-column SE detector (ICD) 
    • Elstar in-column BSE detector (MD)
    • Everhart-Thornley SE detector (ETD)
    • DBS retractable segmented under lens BSED

  • JEOL 2100F FEGTEM/STEM (2011) with:
    • Oxford X-MaxN 80T EDX Detector (2014)
    • Gatan Imaging Filter (EELS Spectrometer)
    • Gatan OneView 4k CCD Camera
  • JEOL 2010 TEM (1990) with:
    • Oxford X-MaxN 80T EDX Detector
    • Gatan Imaging Filter (EELS Spectrometer)
    • Gatan Orius SC600A CCD Camera (2011)
  • JEOL 1010 TEM (2001) with:
    • Gatan Orius SC600 CCD Camera (2014)

  • Thermo K-alpha X-ray Photoelectron Spectrometer (XPS)
  • MFP-3D Infinity Atomic Force Microscope (AFM)
  • Tencor Profilometer
  • ALV Fast DLS particle sizing spectrometer
  • Comprehensive sample preparation equipment including Critical-Point dryer, Sputter coating, JEOL Ion Slicer, Gatan PIPS and Gatan PECS
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Acknowledgement of Country

RMIT University acknowledges the people of the Woi wurrung and Boon wurrung language groups of the eastern Kulin Nation on whose unceded lands we conduct the business of the University. RMIT University respectfully acknowledges their Ancestors and Elders, past and present. RMIT also acknowledges the Traditional Custodians and their Ancestors of the lands and waters across Australia where we conduct our business - Artwork 'Luwaytini' by Mark Cleaver, Palawa.

aboriginal flag
torres strait flag

Acknowledgement of Country

RMIT University acknowledges the people of the Woi wurrung and Boon wurrung language groups of the eastern Kulin Nation on whose unceded lands we conduct the business of the University. RMIT University respectfully acknowledges their Ancestors and Elders, past and present. RMIT also acknowledges the Traditional Custodians and their Ancestors of the lands and waters across Australia where we conduct our business.