Complete equipment list

A complete list of equipment available for use within the MicroNano Research Facility, sorted by the acronym used for booking.

  • 3DN - 3D laser lithography system (Nanoscribe)
  • AFM - Atomic force microscope (Dimension Icon)
  • BFM - Biological atomic force microscope (Asylum MFP-3D)
  • BRE - Bosch etcher (Oxford PlasmaPro 100 Estrelas)
  • CFM - Microphotospectrometer (CRAIC Technologies 20/30 PVTM)
  • CVD - Chemical Vapour Deposition cluster system (Oxford PlasmaPro 100 multi-chamber)
  • CVD-ALD - atomic layer deposition
  • CVD-DRIE - deep reactive ion etcher
  • PECVD - plasma enhanced chemical vapour deposition
  • FAC - Flow cytometer cell sorter (BD Biosciences FACSJazz)
  • FIB - Dual beam-focussed ion beam (Ziess ORION NanoFab)
  • HMA - Mask Aligner with NIL and BS Align (EVG 610)
  • HSC - Spin and Spray Coater (EVG101)
  • LEB - E Beam evaporator (Lesker PVD75)
  • LMA - Mask Aligner (SUSS MA6)
  • LSP - Sputter system (John Morris PVD 75)
  • MSA - Micro system analyzer laser doppler vibrometer (Polytec MSA-500)
  • NST - Stochastic optical reconstruction microscope and confocal system (Nikon N-STORM)
  • SEM - Desktop scanning electron microscope (Agilent FE8500)
  • UHF - Ultra high frequency laser doppler vibrometer (Polytec UHF-120)
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Acknowledgement of country

RMIT University acknowledges the people of the Woi wurrung and Boon wurrung language groups of the eastern Kulin Nation on whose unceded lands we conduct the business of the University. RMIT University respectfully acknowledges their Ancestors and Elders, past and present. RMIT also acknowledges the Traditional Custodians and their Ancestors of the lands and waters across Australia where we conduct our business. - Artwork created by Louisa Bloomer